Trade Lead Description:
Optical coatings
Hard coatings
Metal coatings
Polymer surface modifications
Coatings for flat panel display electorates
Special Features
In-line sputter system with 8ea linear sputter guns for R&D and a small-scale production. Automatic process control through PLC interfacing. Carrier loading capability: 2x24" sheets/carrier. Standard tact time: depends on processing. Automatic jig moving system. Ion cleaning system with linear ion gun. Sheet capacity: 300 × 24" per day. Average throughput Up to 90,000 sheets per year
Specifications
Dimension: 10,464L x 2,244.5H x 1,363W (mm3) Power: Sputter Gun: DC Pulse 10kW
Ion Gun: 3kW
Gas: Ar, O2, N2
Pump: Loading, Rotary (1,000L/min), TMP (800L/sec) Process, Rotary (1,000L/min), TMP (1,400L/sec)
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Posted from Korea, South - Inch'on-gwangyoksi on 8 December, 2012 Last Modified on 6 January, 2013
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